Method and apparatus using variable capacitance compensation for thickness shear mode sensors
The present invention comprises a sensor apparatus used to measure surface mechanical loading such as a liquid loading that compensates for static capacitance in the sensor. The sensor includes a resonator and a variable capacitance device. The resonator and its concomitant circuitry has a static ca...
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| Format: | Patent |
| Sprache: | eng |
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| Zusammenfassung: | The present invention comprises a sensor apparatus used to measure surface mechanical loading such as a liquid loading that compensates for static capacitance in the sensor. The sensor includes a resonator and a variable capacitance device. The resonator and its concomitant circuitry has a static capacitance and is adapted to increase its motional impedance when exposed to surface mechanical loading. The variable capacitance device is connected to the resonator and is adapted to compensate for the static capacitance, whereby the range and linearity of the sensor apparatus are improved. |
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