Piezoelectrically actuated tunable electronic device

A piezoelectrically actuated electronic device comprises a substrate, a support and a first electrode provided on said support and a second electrode provided on said substrate, is disclosed. The support comprises a center portion and at least two elastic and symmetric arms, at least two piezoelectr...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
Hauptverfasser: PENG CHENG-JIEN, SHING TAI-KANG
Format: Patent
Sprache:eng
Schlagworte:
Online-Zugang:Volltext bestellen
Tags: Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
Beschreibung
Zusammenfassung:A piezoelectrically actuated electronic device comprises a substrate, a support and a first electrode provided on said support and a second electrode provided on said substrate, is disclosed. The support comprises a center portion and at least two elastic and symmetric arms, at least two piezoelectric films positioned on respective arms of said support and upper electrode and lower electrode for said piezoelectric films. The piezoelectric films are adhered firmly to the corresponding positions on the arms, relative to the center portion of said support, whereby extensions of the piezoelectric films will cause curving of said arms. By providing a voltage to said piezoelectric films, the length of the piezoelectric films will extend, such that the distance between said first electrode on said support and said second electrode on said substrate may be changed.