Iridium and iridium oxide electrodes used in ferroelectric capacitors

Iridium and iridium oxide electrodes used in ferroelectric capacitors

The present invention provides a capacitor having upper and lower electrodes formed of iridium or iridium oxide or combinations thereof. The electrodes are preferably formed using physical vapor deposition. An insulating layer disposed between the electrodes can be a ferroelectric ceramic such as PZ...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: SAJOTO TALEX, ABOOAMERI FARID, ZHAO JUN, SIVARAMAKRISHNAN VISWESWAREN, SINGH KAUSHAL KISHORE, LIM VICENTE
Format: Patent
Sprache:eng
Schlagworte:
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
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Beschreibung
Zusammenfassung:The present invention provides a capacitor having upper and lower electrodes formed of iridium or iridium oxide or combinations thereof. The electrodes are preferably formed using physical vapor deposition. An insulating layer disposed between the electrodes can be a ferroelectric ceramic such as PZT or PLZT.