Nanostructure plasma source

An arc source macroparticle filter comprising a cathode for emitting particles, an anode for accelerating said emitted particles, means for generating a magnetic field to form magnetic walls to deflect and guide curved plasma stream for directing ions toward a substrate and separate therefrom undesi...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser:	CHEREPANOV VLADIMIR, GINOVKER ANDREY, MOLENDA DAREK
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR ELECTRICITY GAMMA RAY OR X-RAY MICROSCOPES IRRADIATION DEVICES NUCLEAR ENGINEERING NUCLEAR PHYSICS PHYSICS PLASMA TECHNIQUE PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OFNEUTRONS PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMICBEAMS TECHNIQUES FOR HANDLING PARTICLES OR IONISING RADIATION NOTOTHERWISE PROVIDED FOR
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Beschreibung
Zusammenfassung:	An arc source macroparticle filter comprising a cathode for emitting particles, an anode for accelerating said emitted particles, means for generating a magnetic field to form magnetic walls to deflect and guide curved plasma stream for directing ions toward a substrate and separate therefrom undesirable macroparticles.