Measurement device with remote adjustment of electron beam stigmation by using MOSFET ohmic properties and isolation devices

A device and method are presented for adjusting Quadrupole Stigmation Magnetic Lenses of scanning electron microscope systems and for similar systems requiring high resolution particle beams. The ohmic characteristics of MOSFET devices are changed by electronic commands to calibrate particle beams,...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	LEN AMIR, AIZENBERG GUSTAVO E
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRICITY MEASURING MEASURING ELECTRIC VARIABLES MEASURING MAGNETIC VARIABLES PHYSICS TESTING
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