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Structure for disposing a material to be treated at an acute angle relative to the axis of rotation so as to permit the substrate to rotate relative to said structure.

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Bibliographische Detailangaben
Hauptverfasser:	GINOVKER ANDREY, DRUKER LEONID, MOLENDA DAREK, WARZYSZYNSKI MARIUSZ
Format:	Patent
Sprache:	eng
Schlagworte:	CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL DIFFUSION TREATMENT OF METALLIC MATERIAL INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL METALLURGY SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION
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Beschreibung
Zusammenfassung:	Structure for disposing a material to be treated at an acute angle relative to the axis of rotation so as to permit the substrate to rotate relative to said structure.