METHOD OF DETERMINING THE SHAPE OF A PROBE FOR A STYLUS PROFILOMETER

METHOD OF DETERMINING THE SHAPE OF A PROBE FOR A STYLUS PROFILOMETER

A method of characterizing the shape of a probe element for a scanning probe microscope including using two test pattern surfaces of known configuration, the first surface having a pointed wedge-shaped tip and the second surface having an hour-glass type cross-section, wherein the surfaces are scann...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: PLEW LARRY E, HOUGE ERIK CHO, STEVIE FRED ANTHONY, BINDELL JEFFREY BRUCE, SHOFNER TERRI LYNN
Format: Patent
Sprache:eng
Schlagworte:
MEASURING
MEASURING ANGLES
MEASURING AREAS
MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS
PHYSICS
TESTING
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Beschreibung
Zusammenfassung:A method of characterizing the shape of a probe element for a scanning probe microscope including using two test pattern surfaces of known configuration, the first surface having a pointed wedge-shaped tip and the second surface having an hour-glass type cross-section, wherein the surfaces are scanned to generate scan lines having curved transition zones that are geometrically matched in order to generate a probe characteristic representation curve, wherein the probe characteristic representation curve is a graphic representation of the shape of the tip of the probe.