Recessed bond pad

A recessed bond pad within an electronic device on a substrate, and associated method of fabrication. The electronic device includes N contiguous levels of interconnect metallurgy, with level N coupled to the substrate. A first group of metallic etch stops is formed at level M

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Bibliographische Detailangaben
Hauptverfasser: STAMPER ANTHONY K, YANKEE SALLY J
Format: Patent
Sprache:eng
Schlagworte:
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Beschreibung
Zusammenfassung:A recessed bond pad within an electronic device on a substrate, and associated method of fabrication. The electronic device includes N contiguous levels of interconnect metallurgy, with level N coupled to the substrate. A first group of metallic etch stops is formed at level M