Semiconductor device and method of manufacturing the same

A semiconductor device has a plurality of transistor units each of which is constituted by a unit prepared by arranging a plurality of unit cells each made up of a drain, gate, and source adjacent to each other on the major surface of a semiconductor substrate, a gate extraction electrode which exte...

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Hauptverfasser: INOUE TOSHIAKI, WATANABE TOSHIROU
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:A semiconductor device has a plurality of transistor units each of which is constituted by a unit prepared by arranging a plurality of unit cells each made up of a drain, gate, and source adjacent to each other on the major surface of a semiconductor substrate, a gate extraction electrode which extends in a direction perpendicular to the longitudinal direction of the gate and is commonly connected to the gates of the unit cells, a drain extraction electrode which is positioned at a side where the drain extraction electrode faces the gate extraction electrode via the unit, extends in a direction perpendicular to the longitudinal direction of the drain, and is commonly connected to the drains of the unit cells, a gate pad connected to the gate extraction electrode, and a drain pad connected to the drain extraction electrodes. The gate pads of adjacent transistor units are connected to each other by a gate extraction electrode connection wiring line having a resistor of 0.6 to 10OMEGA. The drain pads are connected to each other by a drain extraction electrode connection wiring line. A method of manufacturing this semiconductor device is also disclosed.