Method to force-balance capacitive transducers

A method to maintain a movable electrode of a variable capacitor in fixed relationship with a stationary electrode by electrostatic force feedback when one capacitor electrode is grounded. The invention exploits the high quiescent capacitance and capacitance-load sensitivity of a variable-area capac...

Ausführliche Beschreibung

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Bibliographische Detailangaben
1. Verfasser:	MCINTOSH ROBERT B
Format:	Patent
Sprache:	eng
Schlagworte:	ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVEREDIN A SINGLE OTHER SUBCLASS INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT MEASURING MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER,MECHANICAL EFFICIENCY, OR FLUID PRESSURE MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION,OR SHOCK MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICALDEVICES MICROSTRUCTURAL TECHNOLOGY PERFORMING OPERATIONS PHYSICS TARIFF METERING APPARATUS TESTING TRANSPORTING
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Beschreibung
Zusammenfassung:	A method to maintain a movable electrode of a variable capacitor in fixed relationship with a stationary electrode by electrostatic force feedback when one capacitor electrode is grounded. The invention exploits the high quiescent capacitance and capacitance-load sensitivity of a variable-area capacitance transducer in combination with the advantage of controlling the flexible electrode with a low voltage compared to transducers with parallel-plate capacitors. The invention can be used to accurately control the position of a surface, stylus, inertial mass, valve, electrical contact, electrical component; or an optical component such as a mirror, lens, grating, filter, or holographic element.