Manufacturing method of a liquid crystal display
It is intended to provide a manufacturing method of a liquid crystal display that can reduce the manufacturing cost by decreasing the number of masks. A gate insulating film, a semiconductor film, and a silicon nitride film are laid on a substrate on which a gate bus line is formed, back exposure is...
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Sprache: | eng |
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Zusammenfassung: | It is intended to provide a manufacturing method of a liquid crystal display that can reduce the manufacturing cost by decreasing the number of masks. A gate insulating film, a semiconductor film, and a silicon nitride film are laid on a substrate on which a gate bus line is formed, back exposure is performed by using the gate bus line as a mask, and the silicon nitride film is then patterned, whereby a channel protective film is formed along the gate bus line. Two device isolation holes are formed over the gate bus line at two locations that are on both sides of a source electrode and a drain electrode and that are separated from each other in the extending direction of the gate bus line. A thin-film transistor is formed in such a manner that a semiconductor active film is formed by a portion of the semiconductor film that is interposed between the two device isolation holes and is thereby electrically isolated from other pixel regions and that a gate electrode is formed by a portion of the gate bus line that is located between the two device isolation holes. |
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