Heating furnace including vertically spaced-apart double-sided far-infrared-radiation panel heaters defining multi-stage drying chambers

A multi-stage heating furnace for drying large-sized substrates arranged in a stack, including a furnace body, and shelf heaters arranged within the furnace body such that the shelf heaters are spaced from each other in a vertical direction at a predetermined spacing pitch and such that adjacent one...

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Bibliographische Detailangaben
Hauptverfasser:	SAKAI TAMOTSU, KANO TAKAHIRO, TACHIKAWA HISAYASU
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS BLASTING DEVICES OR ARRANGEMENTS, THE OPTICAL OPERATION OF WHICH ISMODIFIED BY CHANGING THE OPTICAL PROPERTIES OF THE MEDIUM OF THEDEVICES OR ARRANGEMENTS FOR THE CONTROL OF THE INTENSITY,COLOUR, PHASE, POLARISATION OR DIRECTION OF LIGHT, e.g.SWITCHING, GATING, MODULATING OR DEMODULATING DRYING DRYING SOLID MATERIALS OR OBJECTS BY REMOVING LIQUID THEREFROM ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY FREQUENCY-CHANGING HEATING LIGHTING MECHANICAL ENGINEERING NON-LINEAR OPTICS OPTICAL ANALOGUE/DIGITAL CONVERTERS OPTICAL LOGIC ELEMENTS OPTICS PHYSICS SEMICONDUCTOR DEVICES TECHNIQUES OR PROCEDURES FOR THE OPERATION THEREOF WEAPONS
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Beschreibung
Zusammenfassung:	A multi-stage heating furnace for drying large-sized substrates arranged in a stack, including a furnace body, and shelf heaters arranged within the furnace body such that the shelf heaters are spaced from each other in a vertical direction at a predetermined spacing pitch and such that adjacent ones of the shelf heaters partially define drying chambers for accommodating the respective substrates, wherein each shelf heater consists of a far-infrared-radiation panel heater of double-side heating type including a heat radiating plate in which a heat-generating body is embedded, and the panel heater has opposite major surfaces covered with respective thin ceramic layers which emit a far infrared radiation when the heat radiating plate is heated by energization of the heat-generating body.