Non-volatile memory device with filament confinement
A memory device and method of making the same is provided. The memory device includes a first electrode, an oxygen scavenging layer on the first electrode, a hard mask on the oxygen scavenging layer, and a second electrode on the hard mask. A switching layer is arranged on a portion of the oxygen sc...
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| Sprache: | eng |
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| Zusammenfassung: | A memory device and method of making the same is provided. The memory device includes a first electrode, an oxygen scavenging layer on the first electrode, a hard mask on the oxygen scavenging layer, and a second electrode on the hard mask. A switching layer is arranged on a portion of the oxygen scavenging layer, and the switching layer is conformal to a side surface of the hard mask. |
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