Microscope

A microscope includes: illumination optical system irradiating specimen with light and forming fringe illumination; scanning part performing scanning with relative movement between fringe illumination and specimen; phase modulation element setting fringe illumination to a plurality of phase states;...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
Hauptverfasser: Fujikake, Yosuke, Nakayama, Shigeru
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:A microscope includes: illumination optical system irradiating specimen with light and forming fringe illumination; scanning part performing scanning with relative movement between fringe illumination and specimen; phase modulation element setting fringe illumination to a plurality of phase states; a plurality of detectors detecting light from specimen; and image processor generating output image with detection results of predetermined two or more detectors, wherein image processor uses detection results of each of predetermined two or more detectors to generate at least first image, which is detected when fringe illumination is in first phase state, and second image, which is detected when fringe illumination is in second phase state, for each detector, generates intermediate image for each detector by correcting first image and second image based on position of corresponding detector, period of fringe illumination, first phase, and second phase, and generates output image from the plurality of intermediate images.