Composite measurement system for measuring nanometer displacement

A composite measurement system for measuring nanometer displacement is provided. The system includes: a light source, a polarization beam splitting prism, a first phase change module, a second phase change module, a first right-angle prism, a second right-angle prism, a non-polarization beam splitti...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: Shi, Yushu, Pi, Lei, Wang, Fang, Zhang, Shu, Bu, Xiangpeng
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:A composite measurement system for measuring nanometer displacement is provided. The system includes: a light source, a polarization beam splitting prism, a first phase change module, a second phase change module, a first right-angle prism, a second right-angle prism, a non-polarization beam splitting prism, a scalar interference light collection module, a vector interference light collection module and a displacement calculation module. In the present disclosure, a photodetector is configured to collect an intensity of scalar interference light of the object to be measured being moved, to obtain a periodic light intensity change curve; a CCD camera is configured to collect images of interference vortex light of the object being moved; and the displacement calculation unit is configured to calculate a displacement of the object according to integer periods of the light intensity change curve and angles of image changes of the interference vortex light.