Metrology method and apparatus for of determining a complex-valued field

Disclosed is a method of determining a complex-valued field relating to a sample measured using an imaging system. The method comprises obtaining image data relating to a series of images of the sample, imaged at an image plane of the imaging system, and for which at least two different modulation f...

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Bibliographische Detailangaben
Hauptverfasser: Konijnenberg, Alexander Prasetya, Pandey, Nitesh, Coene, Willem Marie Julia Marcel
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:Disclosed is a method of determining a complex-valued field relating to a sample measured using an imaging system. The method comprises obtaining image data relating to a series of images of the sample, imaged at an image plane of the imaging system, and for which at least two different modulation functions are imposed in a Fourier plane of the imaging system; and determining the complex-valued field from the imaging data based on the imposed modulation functions.