Memory device

A highly reliable memory device is provided. On a side surface of a first conductor extending in a first direction, a first insulator, a first semiconductor, a second insulator, a second semiconductor, and a third insulator are provided in this order when seen from the first conductor side. A first...

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Bibliographische Detailangaben
Hauptverfasser: Yamazaki, Shunpei, Okamoto, Yuki, Kunitake, Hitoshi, Godo, Hiromichi, Tsuda, Kazuki, Uochi, Hideki, Okamoto, Satoru, Kimura, Hajime, Matsuzaki, Takanori, Onuki, Tatsuya
Format: Patent
Sprache:eng
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Zusammenfassung:A highly reliable memory device is provided. On a side surface of a first conductor extending in a first direction, a first insulator, a first semiconductor, a second insulator, a second semiconductor, and a third insulator are provided in this order when seen from the first conductor side. A first region overlapping with a second conductor with the first insulator, the first semiconductor, the second insulator, the second semiconductor, and the third insulator therebetween, and a second region overlapping with a third conductor with the first insulator, the first semiconductor, the second insulator, the second semiconductor, and the third insulator therebetween are provided in the first conductor. In the second region, a fourth conductor is provided between the first insulator and the first semiconductor.