Method and device for checking a focus position of a laser beam in relation to a workpiece
A method checks a focus position of a laser beam in relation to a workpiece. The method includes: focusing the laser beam at a plurality of positions along a trajectory on the workpiece; detecting radiation generated during an interaction of the laser beam with the workpiece at a respective position...
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Format: | Patent |
Sprache: | eng |
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Zusammenfassung: | A method checks a focus position of a laser beam in relation to a workpiece. The method includes: focusing the laser beam at a plurality of positions along a trajectory on the workpiece; detecting radiation generated during an interaction of the laser beam with the workpiece at a respective position of the positions; determining signal values corresponding to the detected radiation at the respective position; and checking the focus position at at least one of the positions by comparing the respective one of the signal values at the respective position with a reference value formed from the signal values. |
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