Method and device for checking a focus position of a laser beam in relation to a workpiece

A method checks a focus position of a laser beam in relation to a workpiece. The method includes: focusing the laser beam at a plurality of positions along a trajectory on the workpiece; detecting radiation generated during an interaction of the laser beam with the workpiece at a respective position...

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Bibliographische Detailangaben
1. Verfasser: Bartmuss, Ralf
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:A method checks a focus position of a laser beam in relation to a workpiece. The method includes: focusing the laser beam at a plurality of positions along a trajectory on the workpiece; detecting radiation generated during an interaction of the laser beam with the workpiece at a respective position of the positions; determining signal values corresponding to the detected radiation at the respective position; and checking the focus position at at least one of the positions by comparing the respective one of the signal values at the respective position with a reference value formed from the signal values.