Memory cell array with row direction gap between erase gate lines and dummy floating gates

A memory cell array having rows and columns of memory cells with respective ones of the memory cells including spaced apart source and drain regions formed in a semiconductor substrate with a channel region extending there between, a floating gate over a first portion of the channel region, a select...

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Bibliographische Detailangaben
Hauptverfasser: Lemke, Steven, Kim, Jinho, Liu, Xian, Om'Mani, Henry A, Schneider, Louisa, Tran, Hieu Van, Ghazavi, Parviz, Do, Nhan
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:A memory cell array having rows and columns of memory cells with respective ones of the memory cells including spaced apart source and drain regions formed in a semiconductor substrate with a channel region extending there between, a floating gate over a first portion of the channel region, a select gate over a second portion of the channel region, and an erase gate over the source region. A strap region is disposed between first and second pluralities of the columns. For one memory cell row, a dummy floating gate is disposed in the strap region, an erase gate line electrically connects together the erase gates of the memory cells in the one row and in the first plurality of columns, wherein the erase gate line is aligned with the dummy floating gate with a row direction gap between the erase gate line and the dummy floating gate.