Control unit, radio frequency power generator, and method for generating synchronized radio frequency output signals

A control unit for generating a plurality of synchronized radio frequency (RF) output signals (RFout,i) each having a respective output frequency (fi), phase (Φi), and amplitude (Ai), includinga signal comparator configured to compare a reference signal having a reference frequency (fref) and a reference phase (Φref) with a feedback signal having a feedback frequency (fPLL) and a feedback phase (ΦPLL), and configured to generate an error signal representative of a difference between the reference signal and the feedback signal; anda data processing unit receiving as an input signal the error signal generated by the signal comparator, and outputting a plurality of waveform tuning signals (FTWPLL, FTWi) as a function of the error signal;wherein a plurality of waveform generators (DDSPLL, DDSi) each receiving at least one of the plurality of waveform tuning signals (FTWPLL, FTWi) output by the data processing unit, wherein each waveform generator (DDSPLL, DDSi) generates a time-dependent amplitude signal (APLL(t), Ai(t)) as a function of the received respective waveform tuning signal (FTWPLL, FTWi),wherein one predetermined amplitude signal (APLL(t)) of the generated plurality of amplitude signals (APLL(t), Ai(t)) represents the feedback signal input to the signal comparator, and the other amplitude signals (Ai(t)) represent the respective radio frequency (RF) output signals (RFout,i) to be generated, andwherein the data processing unit is configured to adjust both the waveform tuning signal (FTWPLL) corresponding to the one predetermined amplitude signal (APLL(t)) representing the feedback signal such as to minimize the error signal, and the other waveform tuning signals (FTWi) corresponding to the other amplitude signals (Ai(t)) representing the radio frequency (RF) output signals (RFout,i) based on the adjusted waveform tuning signal (FTWPLL) of the predetermined amplitude signal (APLL(t)) representing the feedback signal.The disclosure further describes a radio frequency (RF) power generator, an arrangement of at least two such radio frequency (RF) power generators, and a method each for generating a plurality of synchronized radio frequency (RF) output signals (RFout,i).