Array of vertical transistors having channel regions connected by an elongated conductor line

An array of vertical transistors comprises spaced pillars individually comprising a channel region of individual vertical transistors. A horizontally-elongated conductor line directly electrically couples together individual of the channel regions of the pillars of a plurality of the vertical transi...

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Bibliographische Detailangaben
Hauptverfasser: Pandey, Deepak Chandra, Liu, Haitao, Karda, Kamal M
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:An array of vertical transistors comprises spaced pillars individually comprising a channel region of individual vertical transistors. A horizontally-elongated conductor line directly electrically couples together individual of the channel regions of the pillars of a plurality of the vertical transistors. An upper source/drain region is above the individual channel regions of the pillars, a lower source/drain region is below the individual channel regions of the pillars, and a conductive gate line is operatively aside the individual channel regions of the pillars and that interconnects multiple of the vertical transistors. Methods are disclosed.