Vibration measurement device

A vibration measurement device 10 includes an excitation unit (signal generator 11 and vibrator 12) for exciting an elastic wave to an inspection target S, an illumination unit (wavelength stabilized laser beam source 13 and illumination light lens 14) for performing stroboscopic illumination to a m...

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Bibliographische Detailangaben
Hauptverfasser: Nagata, Yuya, Hatahori, Takahide, Takubo, Kenji
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:A vibration measurement device 10 includes an excitation unit (signal generator 11 and vibrator 12) for exciting an elastic wave to an inspection target S, an illumination unit (wavelength stabilized laser beam source 13 and illumination light lens 14) for performing stroboscopic illumination to a measurement region of a surface of the inspection target S using a wavelength stabilized laser beam source 13, a displacement measurement unit (speckle-sharing interferometer 15) for collectively measuring a displacement of each point of the measurement region in the back-and-forth direction by speckle interferometry or speckle-sharing interferometer. By using the wavelength stabilized laser beam source 13, an interference image can be obtained even when the inspection target S has large surface irregularities.