Laser processing system

A laser processing device includes a setting device that sets an irradiation condition of laser light, and a first storage that stores the set irradiation condition. The setting device sets different irradiation conditions respectively for cells included in test cells. A verification device captures...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: Tsuchimichi, Kazumi, Ashihara, Yoshimitsu, Sakamoto, Tatsunori, Yoshitake, Naoki, Yokoi, Tadamasa
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:A laser processing device includes a setting device that sets an irradiation condition of laser light, and a first storage that stores the set irradiation condition. The setting device sets different irradiation conditions respectively for cells included in test cells. A verification device captures an image of the processing pattern and calculates luminance values for the cells respectively. The setting device sets at least one of the irradiation conditions for main processing, based on information on luminance values of the test cells extracted from the luminance values for the cells and based on the irradiation conditions set for the test cells.