Test device, change kit, and method of exchanging change kit

Techniques for testing both a rectangular substrate and a circular substrate are provided. One aspect of the present disclosure pertains to a test device comprising an exchangeable change kit, wherein the change kit comprises a first holding device and a second holding device which are exchangeably...

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Bibliographische Detailangaben
Hauptverfasser: Amemiya, Hiroshi, Obikane, Tadashi, Hosaka, Hiroki, Kagami, Fumito
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:Techniques for testing both a rectangular substrate and a circular substrate are provided. One aspect of the present disclosure pertains to a test device comprising an exchangeable change kit, wherein the change kit comprises a first holding device and a second holding device which are exchangeably mounted in the test device, wherein the first holding device is configured to adsorb and hold a rectangular substrate, wherein the second holding device is configured to adsorb and hold a circular substrate, and wherein the first holding device and the second holding device are exchanged according to a substrate to be tested.