Semiconductor structure and method of forming the same, memory and method of forming the same

Semiconductor structure and method of forming the same, memory and method of forming the same

The present invention relates to a semiconductor structure and its forming method, and a memory and its forming method. The semiconductor structure includes a substrate, a vertical transistor on the substrate, and a bit line connected to the bottom of the vertical transistor and disposed between the...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
Hauptverfasser: Ping, Er-Xuan, Zhu, Yiming
Format: Patent
Sprache:eng
Schlagworte:
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
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Beschreibung
Zusammenfassung:The present invention relates to a semiconductor structure and its forming method, and a memory and its forming method. The semiconductor structure includes a substrate, a vertical transistor on the substrate, and a bit line connected to the bottom of the vertical transistor and disposed between the bottom of the vertical transistor and the substrate. The vertical transistor in such a semiconductor structure has a relatively small plane dimension.