Capacitive flexible tactile sensor based on graded inclined micro-cylinder structure

A capacitive flexible tactile sensor based on graded inclined micro-cylindrical structure, includes an upper electrode layer, a lower electrode layer and a dielectric layer between them. The dielectric layer is composed of an upper dielectric layer and a lower dielectric layer. The upper dielectric layer includes an upper dielectric layer base, upper dielectric layer long micro-cylinders and upper dielectric layer short micro-cylinders. The lower dielectric layer includes lower dielectric layer base, lower dielectric layer long micro-cylinder and lower dielectric layer short micro-cylinder. The upper dielectric layer long micro-cylinders and the lower dielectric layer long micro-cylinders are closely bonded, and there is a distance between the upper dielectric layer short micro-cylinder and the lower dielectric layer short micro-cylinder. The sensor structure of the present application is stable, overcomes the viscous effect.