MEMS mirror for OCT probe and method of manufacturing such MEMS mirror

A forward looking MEMS based OCT probe (50) is provided that comprises an elongate probe housing (51) having at a first end a probe interface (54) for an optic fibre (56), and at a second opposite end a viewing window (58). The probe housing accommodates a MEMS mirror (10) for sweeping a hght beam (60) through the viewing window and for reflecting light received through the viewing window towards the probe interface, wherein a rotation axis (18) of the MEMS mirror extends transverse to a longitudinal axis (62) defined by the probe housing. The MEMS mirror (10) has a stator (12), a rotor (14), and an actuator (16) with at least one pair of mutually interdigitated comb elements including at least a first comb element fixed to the stator defining a reference plane and at least a second comb element fixed to the rotor and that is further coupled at mutually opposite sides via a respective torsion beam (20A, 20B) to the stator. The rotor has a rotor body (14RB) and a rotor support (14RS), fixed at a first face of the rotor body, that keeps the rotor body at a distance from the stator within said rotation range, the rotor body having a mirror surface (14MS) at a second face opposite the first face, the MEMS mirror comprising the stator (12) and the rotor support (14RS) at mutually opposite sides of the reference plane (RP).