Memory device including a semiconducting metal oxide fin transistor and methods of forming the same

A semiconductor device includes a semiconducting metal oxide fin located over a lower-level dielectric material layer, a gate dielectric layer located on a top surface and sidewalls of the semiconducting metal oxide fin, a gate electrode located on the gate dielectric layer and straddling the semico...

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Bibliographische Detailangaben
Hauptverfasser: Wu, Yong-Jie, Ho, Yen-Chung, Yu, Chia-Jung, Hsu, Pin-Cheng, Lin, Chung-Te, Manfrini, Mauricio, Wei, Hui-Hsien
Format: Patent
Sprache:eng
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Zusammenfassung:A semiconductor device includes a semiconducting metal oxide fin located over a lower-level dielectric material layer, a gate dielectric layer located on a top surface and sidewalls of the semiconducting metal oxide fin, a gate electrode located on the gate dielectric layer and straddling the semiconducting metal oxide fin, an access-level dielectric material layer embedding the gate electrode and the semiconducting metal oxide fin, a memory cell embedded in a memory-level dielectric material layer and including a first electrode, a memory element, and a second electrode, and a bit line overlying the memory cell. The first electrode may be electrically connected to a drain region within the semiconducting metal oxide fin through a first electrically conductive path, and the second electrode is electrically connected to the bit line.