Stress relief die implementation

Embodiments disclosed herein include semiconductor packages. In a particular embodiment, the semiconductor package is a wafer level chip scale package (WLCSP). In an embodiment, the WLCSP comprises a die. In an embodiment, the die comprises an active surface and a backside surface. The die has a fir...

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Bibliographische Detailangaben
Hauptverfasser: Stoeckl, Stephan, Seidemann, Georg, Waidhas, Bernd, Molzer, Wolfgang
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:Embodiments disclosed herein include semiconductor packages. In a particular embodiment, the semiconductor package is a wafer level chip scale package (WLCSP). In an embodiment, the WLCSP comprises a die. In an embodiment, the die comprises an active surface and a backside surface. The die has a first coefficient of thermal expansion (CTE). In an embodiment, the WLCSP further comprises a channel into the die. In an embodiment, the channel is filled with a stress relief material, where the stress relief material has a second CTE that is greater than the first CTE.