Feedback loop for controlling a pulsed voltage waveform

Embodiments of this disclosure describe a feedback loop that can be used to maintain a nearly constant sheath voltage and thus creating a mono-energetic IEDF at the surface of the substrate. The system described herein consequently enables a precise control over the shape of IEDF and the profile of...

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Hauptverfasser:	Rogers, James, Plotnikov, Viacheslav, Luere, Olivier, Dorf, Leonid, Kamenetskiy, Evgeny, Dhindsa, Rajinder
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
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creator	Rogers, James Plotnikov, Viacheslav Luere, Olivier Dorf, Leonid Kamenetskiy, Evgeny Dhindsa, Rajinder
description	Embodiments of this disclosure describe a feedback loop that can be used to maintain a nearly constant sheath voltage and thus creating a mono-energetic IEDF at the surface of the substrate. The system described herein consequently enables a precise control over the shape of IEDF and the profile of the features formed in the surface of the substrate.
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title	Feedback loop for controlling a pulsed voltage waveform
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