Vacuum deposition facility and method for coating a substrate

A vacuum deposition facility for continuously depositing, on a running substrate, coatings formed from metal or metal alloy, the facility including-a vacuum chamber and a device for running the substrate through the vacuum chamber along a given path, wherein the vacuum chamber further includes:a cen...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: Marneffe, Didier, Schmitz, Bruno, Bonnemann, Remy, Pace, Sergio, Silberberg, Eric
Format: Patent
Sprache:eng
Schlagworte:
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Beschreibung
Zusammenfassung:A vacuum deposition facility for continuously depositing, on a running substrate, coatings formed from metal or metal alloy, the facility including-a vacuum chamber and a device for running the substrate through the vacuum chamber along a given path, wherein the vacuum chamber further includes:a central casing including a substrate entry and a substrate exit located on two opposite sides of the central casing and a vapor jet coater, the inner walls of the central casing being suited to be heated at a temperature above the condensation temperature of the metal or metal alloy vapors,a vapor trap in the form of an external casing located at the substrate exit of the central casing, the inner walls of the vapor trap being suited to be maintained at a temperature below the condensation temperature of the metal or metal alloy vapors.