Close butted collocated variable technology imaging arrays on a single ROIC

A semiconductor-based imaging device and method of manufacture. A direct bond hybridization (DBH) structure is formed on a top surface of a read out integrated circuit (ROIC). A silicon-based detector is bonded to the ROIC via the DBH structure. A non-silicon-based detector is bonded to the DBH stru...

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Bibliographische Detailangaben
Hauptverfasser: Miller, Scott S, Grama, George, Kilcoyne, Sean P
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:A semiconductor-based imaging device and method of manufacture. A direct bond hybridization (DBH) structure is formed on a top surface of a read out integrated circuit (ROIC). A silicon-based detector is bonded to the ROIC via the DBH structure. A non-silicon-based detector is bonded to the DBH structure located on the top of the ROIC using indium-based hybridization.