Package structure and method of forming the same

The disclosure provides a method of forming a package structure, and the method includes: bonding a die to a wafer; performing a thinning process on the die, wherein the die has a first total thickness variation (TTV) after performing the thinning process; forming a dielectric layer on the wafer to...

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Bibliographische Detailangaben
Hauptverfasser: Chen, Yi-Hsiu, Ko, Jia-Ling, Liao, Ebin, Chiou, Wen-Chih, Shih, Hong-Ye
Format: Patent
Sprache:eng
Schlagworte:
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Beschreibung
Zusammenfassung:The disclosure provides a method of forming a package structure, and the method includes: bonding a die to a wafer; performing a thinning process on the die, wherein the die has a first total thickness variation (TTV) after performing the thinning process; forming a dielectric layer on the wafer to cover sidewalls and a top surface the die; performing a first removal process to remove a first portion of the dielectric layer and expose the top surface of the die; and performing a second removal process to remove a second portion of the dielectric layer and a portion of the die, wherein after performing the second removal process, the die has a second TTV less than the first TTV.