Overhead carrier vehicle and overhead carrier vehicle system
An overhead transport vehicle includes a traveler capable of traveling along a track, and an elevator including a chuck to grip a FOUP and capable of being lifted and lowered with respect to the traveler. The overhead transport vehicle includes a body controller provided in the body to control porti...
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| Format: | Patent |
| Sprache: | eng |
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| Zusammenfassung: | An overhead transport vehicle includes a traveler capable of traveling along a track, and an elevator including a chuck to grip a FOUP and capable of being lifted and lowered with respect to the traveler. The overhead transport vehicle includes a body controller provided in the body to control portions and operations of the overhead transport vehicle, a vibration detector provided in the elevator to detect vibration generated in the elevator, and a vibration monitor provided in the elevator to determine whether a result of vibration detected by the vibration detector is within a permissible range and also output a result of the determining to the body controller. |
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