Semiconductor device and manufacturing method of the semiconductor device

A semiconductor device includes a cell stack structure including first cell stack layers and stack conductive layers, which are alternately stacked. The semiconductor device also includes a dummy stack structure including first dummy stack layers and second dummy stack layers, which are alternately...

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Bibliographische Detailangaben
1. Verfasser: Kim, Jae Taek
Format: Patent
Sprache:eng
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Zusammenfassung:A semiconductor device includes a cell stack structure including first cell stack layers and stack conductive layers, which are alternately stacked. The semiconductor device also includes a dummy stack structure including first dummy stack layers and second dummy stack layers, which are alternately stacked. The semiconductor device further includes a cell plug penetrating the cell stack structure and a cell chip guard penetrating the dummy stack structure, wherein the cell chip guard surrounds the cell stack structure and the cell plug. A level of a bottom surface of a cell chip guard is substantially equal to that of a bottom surface of the cell plug.