Semiconductor layout context around a point of interest

Systems and methods for analyzing a semiconductor layout design around a point of interest (POI) are disclosed. Semiconductor layout designs are a representation of an integrated circuit in terms of planar geometric shapes which make up the components of the integrated circuit, and are used to manuf...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
Hauptverfasser: Selim, Mohamed Alimam Mohamed, Abercrombie, David A, Hamed, Ahmed Hamed Fathi, Hegazy, Hazem, Bahnas, Mohamed
Format: Patent
Sprache:eng
Schlagworte:
Online-Zugang:Volltext bestellen
Tags: Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
Beschreibung
Zusammenfassung:Systems and methods for analyzing a semiconductor layout design around a point of interest (POI) are disclosed. Semiconductor layout designs are a representation of an integrated circuit in terms of planar geometric shapes which make up the components of the integrated circuit, and are used to manufacture the integrated circuit. The layout design may be analyzed using one or more POI-based approaches to determine whether to modify the layout design. In one POI-based approach, set of kernels, tailored to the downstream application, are convolved with a representation of the layout design about or around the POI in order to generate a signature associated with the POI. In turn, the signatures may be analyzed based on the downstream application. Another POI-based approach consists of analyzing geometrical parameters associated with the POI, which may be used during a design stage to identify and modify problem areas in the layout design.