Etching uniformity regulating device and method

An etching uniformity regulating device and method. The device comprises an inductor and a capacitor connected in parallel. One end of the etching uniformity regulating device is connected to a built-in ring located at the edge of an electrostatic chuck of an etching machine, and the other end is gr...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	Liu, Xiaobo, Chen, Lu, Li, Xuedong, Xu, Kaidong, Hou, Yonggang, Li, Na, Qiu, Yong, Hu, Dongdong
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
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