Reliable semiconductor packages

Semiconductor packages and methods for forming thereof are disclosed. The semiconductor package includes a package substrate having a die attach region with a die attached thereto. A protective cover is disposed over a sensor region of the die and attached to the die by a cover adhesive. The cover adhesive may serve as a standoff structure to support the protective cover. The standoff structure may be configured to form multiple cavities below the protective cover to reduce thermal stress on the protective cover. An encapsulant is disposed to cover the package substrate while leaving the top package surface exposed.