Transducer and driving method thereof, and system
A transducer includes: a piezoelectric element; and a film body including a film support portion having a hollow portion, and a vibration film connected to the film support portion and displaceable in a film thickness direction, the film body having the piezoelectric element stacked over the vibrati...
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Format: | Patent |
Sprache: | eng |
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Zusammenfassung: | A transducer includes: a piezoelectric element; and a film body including a film support portion having a hollow portion, and a vibration film connected to the film support portion and displaceable in a film thickness direction, the film body having the piezoelectric element stacked over the vibration film. The piezoelectric element includes: a first stacked body having a first pair of electrodes and a first piezoelectric film sandwiched between the first pair of electrodes; and a second stacked body having a second pair of electrodes and a second piezoelectric film sandwiched between the second pair of electrodes, the second stacked body being separated from the first stacked body. |
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