System for coupling RF power into LINACs and bellows coating by magnetron sputtering with kick pulse

A system and associated method are described for depositing high-quality films for providing a coating on a three-dimensional surface such as an internal surface of a bellows structure. The system includes a magnetic array comprising multiple sets of magnets arranged to have Hall-Effect regions that...

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Bibliographische Detailangaben
Hauptverfasser: Stubbers, Robert A, Shchelkanov, Ivan A, Houlahan, Jr., Thomas J, Menet, Daniel P, Haehnlein, Ian F, Jurczyk, Brian E
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:A system and associated method are described for depositing high-quality films for providing a coating on a three-dimensional surface such as an internal surface of a bellows structure. The system includes a magnetic array comprising multiple sets of magnets arranged to have Hall-Effect regions that run lengthwise along a sputter target. The system further includes an elongated sputtering electrode material tube surrounding the magnetic array comprising multiple sets of magnets arranged to have Hall-Effect regions that run lengthwise along the sputter target. During operation, the system generates and controls ion flux for direct current high-power impulse magnetron sputtering. During operation logic circuitry issues a control signal to control a kick pulse property of a sustained positive voltage kick pulse taken from the group consisting of: onset delay, amplitude and duration.