Apparatus for the automated assembly of a probe head

Apparatus for the automated assembly of a probe head

An apparatus for the automated assembly of a probe head for testing electronic devices integrated on a semiconductor wafer, includes a support adapted to support at least two parallel guides, which are provided with a plurality of respective guides holes, and at least one holding means adapted to ho...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
Hauptverfasser: Delettre, Anne, Heriban, David, Villain, Jean-Christophe, Perreau, Jocelyn, Subranni, Roberto, Perrocheau, Florent
Format: Patent
Sprache:eng
Schlagworte:
COMBINED OPERATIONS
MACHINE TOOLS
MEASURING
MEASURING ELECTRIC VARIABLES
MEASURING MAGNETIC VARIABLES
METAL-WORKING NOT OTHERWISE PROVIDED FOR
OTHER WORKING OF METAL
PERFORMING OPERATIONS
PHYSICS
TESTING
TRANSPORTING
UNIVERSAL MACHINE TOOLS
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Beschreibung
Zusammenfassung:An apparatus for the automated assembly of a probe head for testing electronic devices integrated on a semiconductor wafer, includes a support adapted to support at least two parallel guides, which are provided with a plurality of respective guides holes, and at least one holding means adapted to hold a contact probe to be housed in the guides holes, of the guides. Suitably, the support is a movable support adapted to be moved according to a preset trajectory between a first position, wherein the contact probe is held by the holding means at a predetermined position outside the guides holes, and a second position wherein the contact probe, which is held at the predetermined position, is housed in a set of guides holes that are substantially concentric to each other.