Flow rate controller and drive device equipped with same

A flow rate controller and a drive device are provided with a cylinder flow passage connected to an air cylinder; a main flow passage for supplying air to and discharging air from the air cylinder; an auxiliary flow passage that has a first throttle valve and through which exhaust air discharged fro...

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Bibliographische Detailangaben
Hauptverfasser: Asahara, Hiroyuki, Monden, Kengo, Takakuwa, Youji, Kazama, Akihiro
Format: Patent
Sprache:eng
Schlagworte:
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