Flow rate controller and drive device equipped with same

A flow rate controller and a drive device are provided with a cylinder flow passage connected to an air cylinder; a main flow passage for supplying air to and discharging air from the air cylinder; an auxiliary flow passage that has a first throttle valve and through which exhaust air discharged fro...

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Bibliographische Detailangaben
Hauptverfasser: Asahara, Hiroyuki, Monden, Kengo, Takakuwa, Youji, Kazama, Akihiro
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:A flow rate controller and a drive device are provided with a cylinder flow passage connected to an air cylinder; a main flow passage for supplying air to and discharging air from the air cylinder; an auxiliary flow passage that has a first throttle valve and through which exhaust air discharged from the air cylinder passes with a smaller flow rate than that of the main flow passage; a switch valve that switches between a first position in which the cylinder flow passage communicates with the main flow passage and a second position in which the cylinder flow passage communicates with the auxiliary flow passage; and a pilot air adjustment part that guides a portion of the exhaust air from the air cylinder as pilot air to the switch valve.