Palladium-coated copper bonding wire, manufacturing method of palladium-coated copper bonding wire, semiconductor device using the same, and manufacturing method thereof

A palladium-coated copper bonding wire includes: a core material containing copper as a main component; and a palladium layer on the core material, in which a concentration of palladium relative to the entire wire is 1.0 mass % or more and 4.0 mass % or less, and a work hardening coefficient in an a...

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Bibliographische Detailangaben
Hauptverfasser: Kobayashi, Takuya, Takada, Mitsuo, Ishikawa, Ryo, Maeda, Nanako, Matsuzawa, Osamu
Format: Patent
Sprache:eng
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Zusammenfassung:A palladium-coated copper bonding wire includes: a core material containing copper as a main component; and a palladium layer on the core material, in which a concentration of palladium relative to the entire wire is 1.0 mass % or more and 4.0 mass % or less, and a work hardening coefficient in an amount of change of an elongation rate 2% or more and a maximum elongation rate ε max % or less of the wire, is 0.20 or less.