Systems and methods for measuring trace contaminants in gas matrix using integrated cavity output spectroscopy

A laser absorption spectrometry system for gas measurement is provided. The system includes an integrated cavity output spectroscopy (ICOS) assembly. The assembly includes a gas cell including a cell body defining an optical cavity, one or more tunable diode lasers having one or more nominal wavelen...

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Bibliographische Detailangaben
Hauptverfasser:	Tanguay, François, Lanher, Bertrand Simon, Meunier, Axel, Owen, Kyle, Leen, John Brian
Format:	Patent
Sprache:	eng
Schlagworte:	INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MEASURING PHYSICS TESTING
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Beschreibung
Zusammenfassung:	A laser absorption spectrometry system for gas measurement is provided. The system includes an integrated cavity output spectroscopy (ICOS) assembly. The assembly includes a gas cell including a cell body defining an optical cavity, one or more tunable diode lasers having one or more nominal wavelengths, and a reflective collimation mirror positioned in an optical path between the one or more tunable diode lasers and the gas cell.