Chip package structure with buffer structure and method for forming the same

A method for forming a chip package structure is provided. The method includes removing a first portion of a substrate to form a first recess in the substrate. The method includes forming a buffer structure in the first recess. A first Young's modulus of the buffer structure is less than a seco...

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Bibliographische Detailangaben
Hauptverfasser: Lin, Yu-Sheng, Yang, Che-Chia, Chen, Ping-Tai, Lai, Po-Chen, Wang, Chin-Hua, Lin, Po-Yao, Jeng, Shin-Puu
Format: Patent
Sprache:eng
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Zusammenfassung:A method for forming a chip package structure is provided. The method includes removing a first portion of a substrate to form a first recess in the substrate. The method includes forming a buffer structure in the first recess. A first Young's modulus of the buffer structure is less than a second Young's modulus of the substrate. The method includes forming a first wiring structure over the buffer structure and the substrate. The method includes bonding a chip package to the first wiring structure. The chip package has an interposer substrate and a chip structure over the interposer substrate, and a first corner of the interposer substrate and a second corner of the chip structure overlap the buffer structure in a top view of the chip package and the buffer structure.