Displacement magnifying mechanism, polishing device, actuator, dispenser, and air valve

A displacement magnifying mechanism includes a base portion serving as a substrate; a first attachment portion and a second attachment portion which are provided on a surface on one side of the base portion; a first piezoelectric element and a second piezoelectric element of which one ends are attac...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: Yano, Akio, Chee, Sze Keat, Yano, Takeshi
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:A displacement magnifying mechanism includes a base portion serving as a substrate; a first attachment portion and a second attachment portion which are provided on a surface on one side of the base portion; a first piezoelectric element and a second piezoelectric element of which one ends are attached to the first attachment portion and the second attachment portion; an operating portion which is connected to the other ends of the first piezoelectric element and the second piezoelectric element and generates a displacement due to expansion and contraction of the piezoelectric element; and a link portion which is disposed at the center between the first piezoelectric element and the second piezoelectric element, links the operating portion and the base portion, and is made of a material having a higher Young's modulus than that of the first piezoelectric element and the second piezoelectric element.