Flexible stamp with tunable high dimensional stability

A flexible stamp comprising at least three layers, an upper layer as a texturing layer (203) having a relief area (203B), a strengthening layer (202) and a protective layer (201), characterized in that the strengthening layer (202) has a thermal expansion coefficient of 10 ppm/° C. or lower, a Young...

Ausführliche Beschreibung

Gespeichert in:

Bibliographische Detailangaben
Hauptverfasser:	Van Erven, Adrianus, Veldhuizen, Leon Willem, Titulaer, Bram Johannes, Ter Meulen, Jan Matthijs
Format:	Patent
Sprache:	eng
Schlagworte:	APPARATUS SPECIALLY ADAPTED THEREFOR CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY MATERIALS THEREFOR ORIGINALS THEREFOR PHOTOGRAPHY PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES PHYSICS
Online-Zugang:	Volltext bestellen
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!

Beschreibung
Zusammenfassung:	A flexible stamp comprising at least three layers, an upper layer as a texturing layer (203) having a relief area (203B), a strengthening layer (202) and a protective layer (201), characterized in that the strengthening layer (202) has a thermal expansion coefficient of 10 ppm/° C. or lower, a Young's modulus in the range of 10 GPa-200 GPa, a layer thickness of below 300 μm and an area which at least covers the relief area (203B).