Exploratory data interface

A method for production analysis includes: receiving production data at a processor from a plurality of tools spatially arranged within a manufacturing facility; creating a hierarchal topology of the data in the processor, wherein each level of the hierarchal topology is based on a different one of...

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Bibliographische Detailangaben
Hauptverfasser: Sim, Jang, Luo, Cheng-Tin, Lin, Cheng-Yi, Chidambarrao, Dureseti, Fry, Jonathan
Format: Patent
Sprache:eng
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Zusammenfassung:A method for production analysis includes: receiving production data at a processor from a plurality of tools spatially arranged within a manufacturing facility; creating a hierarchal topology of the data in the processor, wherein each level of the hierarchal topology is based on a different one of a plurality of static parameters that are selected from a list consisting of: a tool identifier, a batch identifier, and a spatial orientation; displaying, at a user interface implemented by the processor, a first analysis of a first level of the hierarchal topology, wherein the analysis contains parameters related to other levels of the hierarchal topology; receiving, via the user interface, a selection by a user of a first parameter displayed on the first analysis; and updating the user interface to display a second analysis of a second level of the hierarchal topology that is related to the first parameter.