Fluid control device, fluid control system, storage medium storing a program for fluid control device, and fluid control method

In order to prevent unnatural behavior of a calculated flow rate, provided is a fluid control device in which a fluid control valve and upstream and downstream pressure sensors are provided on a flow path. The device includes a calculation unit configured to calculate a flow rate based on measured p...

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Bibliographische Detailangaben
Hauptverfasser: Matsuura, Kazuhiro, Matsumoto, Sota, Nagai, Kentaro, Hisamori, Yosuke
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:In order to prevent unnatural behavior of a calculated flow rate, provided is a fluid control device in which a fluid control valve and upstream and downstream pressure sensors are provided on a flow path. The device includes a calculation unit configured to calculate a flow rate based on measured pressures; and an output unit configured to output the calculated flow rate, and exhibit a zero output function of outputting a zero value regardless of the calculated flow rate when the valve is in a closed state. The device is further configured to switch between execution and stop of the zero output function, and when the valve is in an open state and a difference between the measured pressures of the pressure sensors is larger than a threshold, stop the zero output function and cause the flow rate output unit to output the calculated flow rate.